With the rapid development of the semiconductor industry, the requirements for production equipment and processes are becoming higher and higher. In the semiconductor manufacturing process, a large number of pipes and hoses are used to transport various gases, liquids and chemicals. PTFE hose is widely used in the semiconductor industry due to its unique properties.
Performance advantages of PTFE hose
High temperature resistance
In the process, processes the temp is very high. PTFE hose has excellent high temperature resistance and can work for a long time in -60℃ to 250℃ without deformation or damage.
Corrosion resistance
During the process, it will use a variety of corrosive gases and chemicals. PTFE pipe has excellent corrosion resistance and is resistant to most corrosive gases and chemicals without chemical reaction or corrosion.
low coefficient of friction
In the process, it will transport high-speed and high-precision fluids. The PTFE tube has a low friction coefficient, which can reduce the friction loss of fluid and improve transmission efficiency. At the same time, Teflon pipe also has excellent anti-stick properties. It can avoid fluid adhesion and deposition in the pipeline and ensure the cleanness and smoothness of the pipeline.
High transparency
During the semiconductor manufacturing process, fluids need to be monitored and controlled in real time. The Teflon hose has high transparency, making it easy to observe the flow state and quality changes of the fluid.
Application of PTFE hose in semiconductor industry
Gas delivery
In the process, a large amount of high-purity gases, such as nitrogen, oxygen, argon, etc., need to be used. PTFE hose has excellent gas transmission properties and can ensure gas purity and transmission efficiency.
liquid transport
In the process, it uses a large amount of liquid chemicals. Such as photoresist, cleaning fluid, etching fluid, etc. PTFE hose resists corrosion well and can ensure liquid quality.
Vacuum system
During the process, it requires vacuum systems to maintain the cleanliness. PTFE hose has excellent vacuum sealing performance and can ensure the sealing and stability of the vacuum system.
High temp environment
It requires high temp in the semiconductor process. Such as thermal oxidation, thermal diffusion, etc. PTFE hose has excellent high temp resistance and can work at high temp for a long time.